Optical beam induced current

Optical beam induced current (OBIC) is a semiconductor analysis technique performed using laser signal injection. The technique uses a scanning laser beam to create electron–hole pairs in a semiconductor sample. This induces a current which may be analyzed to determine the sample's properties, especially defects or anomalies.

Conventional OBIC scans an ultrafast laser beam over the surface of the sample, exciting some electrons into the conduction band through what is known as 'single-photon absorption'. As its name implies, single-photon absorption involves just a single photon to excite the electron into conduction. This can only occur if that single photon carries enough energy to overcome the band gap of the semiconductor (1.2 eV for Si) and provide the electron with enough energy to make it jump into the conduction band.

Contents

Uses

The technique is used in semiconductor failure analysis to locate buried diffusion regions, damaged junctions and gate oxide shorts.[1]

The OBIC technique may be used to detect the point at which a focused ion beam (FIB) milling operation in bulk silicon of an IC must be terminated (also known as endpoint). This is accomplished by using a laser to induce a photocurrent in the silicon while simultaneously monitoring the magnitude of the photocurrent by connecting an ammeter to the device's power and ground. As the bulk silicon is thinned, the photocurrent is increased and reaches a peak as the depletion region of the well to substrate junction is reached. This way, endpoint can be achieved to just below the well depth and the device remains operational.[2]

Notes

  1. ^ Cole 2004, p. 411
  2. ^ Antoniou 2004, p. 72

References

  • Cole, Ed; et al. (2004), "Beam-Based Defect Localization Methods", Microelectronics Failure Analysis (Materials Park: ASM International), ISBN 0-87170-804-3 .
  • Antoniou, Nicholas (2004), "The Process of Editing Circuits Through the Bulk Silicon", Microelectronics Failure Analysis (Materials Park: ASM International), ISBN 0-87170-804-3 .

Further reading

  • Manfred Frischholz, Jörg Seidel, Adolf Schoner, Ulf Gustafsson, Mietek Bakowski, Kenneth Nordgren and Kurt Rottner (1998), "JTE concept evaluation and failure analysis: OBIC measurements on 4H Sic p+-n diodes", Proceedings of 1998 International Symposium on Power Semiconductor Devices & ICs, Kyoto: 391–394. 



Wikimedia Foundation. 2010.

Look at other dictionaries:

  • Optical beam-induced currents — Optical Beam Induced Current (OBIC) is a semiconductor analysis technique that employs a scanning laser beam to induce a current flow within a semiconductor sample which may be collected and analyzed to generate images that represent the sample s …   Wikipedia

  • Optical fiber — A bundle of optical fibers A TOSLINK fiber optic audio c …   Wikipedia

  • Optical transfection — is the process of introducing nucleic acids into cells using light. Typically, a laser is focussed to a diffraction limited spot ( 1 µm diameter) using a high numerical aperture microscope objective. The plasma membrane of a cell is then… …   Wikipedia

  • Electromagnetically induced transparency — The effect of EIT on a typical absorption line. A weak probe normally experiences absorption shown in blue. A second coupling beam induces EIT and creates a window in the absorption region (red). This plot is a computer simulation of EIT in an… …   Wikipedia

  • 3D optical data storage — is the term given to any form of optical data storage in which information can be recorded and/or read with three dimensional resolution (as opposed to the two dimensional resolution afforded, for example, by CD). [ Three Dimensional Optical Data …   Wikipedia

  • OBIC — Optical Beam Induced Current (Academic & Science » Electronics) …   Abbreviations dictionary

  • List of materials analysis methods — List of materials analysis methods: Contents: Top · 0–9 · A B C D E F G H I J K L M N O P Q R S T U V W X Y Z μSR see Muon spin spectroscopy …   Wikipedia

  • Failure analysis — is the process of collecting and analyzing data to determine the cause of a failure. It is an important discipline in many branches of manufacturing industry, such as the electronics industry, where it is a vital tool used in the development of… …   Wikipedia

  • Caesar Saloma — Caesar A. Saloma is a professor of physics at the [http://www.nip.upd.edu.ph National Institute of Physics] , University of the Philippines, Diliman, Quezon City, Philippines. He is currently the Dean of the College of Science, University of the… …   Wikipedia

  • Thermal laser stimulation — represents a class of defect imaging techniques which employ a laser to produce a thermal variation in a semiconductor device. [Harvnb|Beaudoin|Desplats|Perdue|Boit|2004] This technique may be used for semiconductor failure analysis. There are… …   Wikipedia


Share the article and excerpts

Direct link
Do a right-click on the link above
and select “Copy Link”

We are using cookies for the best presentation of our site. Continuing to use this site, you agree with this.